The NSR-S620D
Enabling the Next Generation
The NSR-S620D was designed to meet the stringent overlay, throughput, and availability requirements for 32 nm double patterning, and provide extendibility to 22 nm applications. With the NSR-S620D, Nikon is once again enabling the next generation of IC manufacturing.
Learn More About the NSR-S620D
Learn More About the S620D Streamlign platform