| Nikon Extends Tool Performance with New
Enhancements
Product Enhancements improve productivity, overlay,
image quality, and dose control
Belmont, California, July 8, 2004 -In
a continued effort to reduce the cost of ownership for its customers,
Nikon Precision Inc. introduced today a suite of new options
designed to enhance the performance of existing NSR steppers
and scanners. This suite includes 10 new individual enhancement
kits and 4 newly developed major software packages. These enhancements
provide increased productivity, improved overlay performance,
imaging optimization, and enhanced dose control.
Nikon has had an intense focus on cost effective lithography
with 5 new systems introduced in the last year, all with increased
productivity and reduced cost of ownership. Due to the large
investment associated with lithography equipment, semiconductor
manufacturers want to use their existing tools at levels beyond
the initial specifications. To meet this request, Nikon has developed
software and hardware upgrades that can push the performance
of existing NSR steppers and scanners beyond their original design
specifications.
Four new software packages, referred to as Litho Enhancement
Paks, are being introduced. These include: QUICKpak for productivity
and efficiency enhancements, SMARTpak for intelligent overlay
optimization, SHARPpak for imaging optimization, and GEMpak,
for fab automation.
Many of the available enhancements will also help reduce the
k1 factor, which improves the system’s resolution. The
k1 factor is part of the resolution equation and can be reduced
through lens optimization, improved focus control, and enhanced
dose adjustment.
The new enhancements kits are available for sale now and will
initially be sold only in the US.
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography
with innovative products and technologies. The company is a
worldwide leader in lithography equipment for the microelectronics
manufacturing industry with more than 7,600 exposure systems
installed worldwide. Nikon offers the most extensive selection
of production-class steppers and scanners in the industry.
These products serve the semiconductor, flat panel display
(LCD) and thin-film magnetic head (TFH) industries. Nikon Precision
Inc. provides service, training, applications and technical
support, as well as sales and marketing for Nikon lithography
equipment in North America. For more information about Nikon,
access our web site at www.nikonprecision.com
Forward Looking Statements
This press release contains forward-looking statements as that
term is defined in the Private Securities Reform Act of 1995,
which are subject to known and unknown risks and uncertainties
that could cause actual results to differ materially from those
expressed or implied by such statements. Such statements are
subject to risks, uncertainties and changes in condition, particularly
those related to industry requirements and other risks. The
Company undertakes no obligation to update the information
in this press release.
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Contact:
Bernie Wood
Director of Marketing
Nikon Precision Inc.,
(650) 413-8533 phone
bwood@nikon.com |