| Nikon Launches Next Generation Scanner
for Advanced 80nm Devices
Belmont, Calif., July 8, 2003 -Targeted for
mass production of advanced 80 nm devices and development of
65 nm devices, Nikon Corporation has introduced the NSR-S307E.
This scanner is the next generation in Nikon's successful ArF
scanner series. The system combines the world’s highest
NA (0.85) projection lens with a newly developed, high productivity
platform, improving resolution while significantly increasing
throughput.
With the cost for IC manufacturing for next generation devices
continually increasing, Nikon focused on leading-edge technology
with high productivity. The NSR-S307E can process more than 160
wafers per hour for 200 mm applications (112 for 300mm).
Nikon continues to raise the bar for image quality with the
industry’s highest quality projection lens. High quality
materials and proprietary manufacturing technology provides a
virtually perfect lens. The NSR-S307E includes detailed environment
control systems to ensure the lens quality is maintained over
the life of the product. Nikon’s lenses are recognized
throughout the industry for their high quality and durability.
“One of the greatest challenges is continually to provide
tools that meet your customers’ next generation requirements”,
stated Geoff Wild, CEO of Nikon Precision, Inc. “We not
only exceeded their technical requirements but we were able to
provide a significant productivity improvement”.
Nikon will begin shipping systems after October of this year.
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography
with innovative products and technologies. The company is a worldwide
leader in lithography equipment for the microelectronics manufacturing
industry with more than 7,200 exposure systems installed worldwide.
Nikon offers the most extensive selection of production-class
steppers and scanners in the industry. These products serve the
semiconductor, flat panel display (LCD) and thin-film magnetic
head (TFH) industries. Nikon Precision Inc. provides service,
training, applications and technical support, as well as sales
and marketing for Nikon lithography equipment in North America.
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This press release contains forward-looking statements as
that term is defined in the Private Securities Reform Act of
1995, which are subject to known and unknown risks and uncertainties
that could cause actual results to differ materially from those
expressed or implied by such statements. Such statements are subject
to risks, uncertainties and changes in condition, particularly
those related to industry requirements and other risks. The Company
undertakes no obligation to update the information in this press
release.
Contacts:
Bernie Wood
Director of Marketing
Nikon Precision Inc.,
(650) 413-8533 phone
bwood@nikon.com |