| Nikon Introduces Latest Step-and-Repeat
KrF Scanner -- NSR-S206D
High-throughput Scanner Featuring Ultra-High N.A. Lens
Targets DRAMs
July 12, 2002 -
Targeted at mass production of cutting-edge devices with 110-nm
design rules, Nikon Corporation introduced the NSR-S206D. This
scanner is the 6th generation in Nikon's successful KrF scanner
series. The NSR-S206D is equipped with the industry's highest
N.A KrF (248nm) lens and provides high throughput of both 200mm
and 300mm wafers.
| Specification Summary |
| Resolution |
<110 nm |
| Numerical Aperture
(N.A.) |
Variable, 0.67 - 0.82 |
| Distortion |
Within ± 12nm |
| Light Source |
4 KHz - 30W KrF (248 nm) Excimer
Laser |
| Coherency Factor (s) |
Variable, 0.30 - 0.90 |
| Projection Magnification |
1:4 |
| Exposure Field |
25 x 33 mm |
| Alignment Accuracy |
20 nm or less (M+ 3 s) |
| Throughput |
300 mm wafers, 88 wafers/hr or more
200 mm wafers, 147 wafers/hr. or more |
The Ultra High N.A. (0.82), low aberration projection lens achieves
a resolution of 110 nm or better. Additionally, distortion has
been reduced to ±12nm or less. These characteristics along
with a variable illumination (s) feature, extend existing KrF process
technology for mass production to the 110 nm node. By utilizing
a 4 KHz-30W laser, throughput has been improved to at least 147
wafers/hr for 200-mm wafers and 88 wafers/hr for 300-mm wafers.
To support ever-decreasing device features, the system boasts a
33% improvement in alignment accuracy -- from 30 to 20 nanometers.
These features make this system especially valuable to makers
of high volume, cost sensitive products like DRAMs who are constantly
shrinking design rules and do not want to invest in additional
technology such as ArF.
About Nikon: Nikon Corporation, is the world leader in lithography
equipment for the microelectronics manufacturing industry with
a 40% market share and more than 7,000 exposure systems installed
worldwide including over 700 DUV scanning systems. Nikon offers
the most extensive selection of production-class steppers and scanners
in the industry. These products serve the wafer, photomask, flat
panel display (LCD) and thin-film magnetic head (TFH) industries.
Nikon Precision Inc. provides service, training, applications and
technical support, as well as sales and marketing for Nikon lithography
equipment in North America.
###
Susan Bernardi
Nikon Precision Inc.
(650) 508-3819
sbernardi@nikon.com |
