| Nikon and Synopsys Collaborate to Deliver
Advanced DFM Lithography Solutions for 45nm and Below
Solutions target improved lithography modeling accuracy,
reduced time to silicon, and improved manufacturing yield
BELMONT,
Calif., – September 20, 2006 – Nikon Corporation,
a leading supplier of lithography equipment for microelectronics
manufacturing, and Synopsys, Inc. (Nasdaq:SNPS), a world leader
in semiconductor design software today announced that they are
collaborating on the development and delivery of advanced lithography
software models and DFM enabled lithography manufacturing solutions
for 45 nm and below.
The Synopsys-Nikon collaboration
brings together both EDA design and optical lithography imaging
system expertise to focus on building next generation “manufacturing-aware” OPC
and RET lithography simulation models. At 45 nm and below, critical
dimension (CD) control will be at the single nanometer levels
pushing current OPC/RET models and optical lithography system
performance to the extreme limits.
Early work will focus on
the development and optimization of new advanced lithography
simulation models, which can intelligently capture the Nikon
lithography system’s proprietary signatures.
Leveraging the new manufacturing-aware models and the collaborative
expertise gained, future work will focus on the development and
deployment of advanced DFM manufacturing in-fab solutions for
Nikon lithography systems.
"At 45 nanometers and below,
the characterization and integration of both design and manufacturing
information is essential,” said Anantha Sethuraman,
Vice President of DFM Solutions at Synopsys. “In this new
DFM centric landscape, design companies must work together to
accelerate time to entitled yield and reduced time to market.”
New lithography simulation and OPC/RET
models must be developed to improve CD performance for 45 nm
and below. To achieve nanometer level CD control with fast turnaround
time, models must be characterized beyond traditional input parameters
such as lithography dose, defocus, light source type and lens
parameters. New simulation and modeling inputs must include immersion
effects, polarization impacts, global and local flare, wavefront
aberrations and other factors that may impact CD performance.
“We believe the accuracy of OPC models can be significantly improved
and mask qualification time reduced, by incorporating our unique lithography
tool characteristics into the EDA software,” stated Toshikazu Umatate,
Executive Officer, Precision Equipment Company, Nikon Corporation. “By
partnering with leading-edge EDA companies like Synopsys we can provide enhanced
imaging performance for our customers.”
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography
with innovative products and technologies. The company is a
worldwide leader in lithography equipment for the microelectronics
manufacturing industry with more than 7,800 exposure systems
installed worldwide. Nikon offers the most extensive selection
of production-class steppers and scanners in the industry.
These products serve the semiconductor, flat panel display
(LCD) and thin-film magnetic head (TFH) industries. Nikon Precision
Inc. provides service, training, applications and technical
support, as well as sales and marketing for Nikon lithography
equipment in North America. For more information about Nikon,
access our web site at www.nikonprecision.com
About Synopsys
Synopsys, Inc. (Nasdaq:SNPS) is a world leader in electronic
design automation (EDA) software for semiconductor design. The
company delivers technology-leading semiconductor design and
verification platforms and IC manufacturing software products
to the global electronics market, enabling the development and
production of complex systems-on-chips (SoCs). Synopsys also
provides intellectual property and design services to simplify
the design process and accelerate time-to-market for its customers.
Synopsys is headquartered in Mountain View, California and has
offices in more than 60 locations throughout North America, Europe,
Japan and Asia. Visit Synopsys online at www.synopsys.com.
About Synopsys DFM
Synopsys offers the industry's most comprehensive design for
manufacturing (DFM) solution that spans from RTL to mask. Its
DFM product family addresses critical manufacturability and yield
issues with its Hercules™ physical verification, Proteus
mask synthesis, CATS® mask data preparation, SiVL® lithography
verification, i-Virtual Stepper™ mask defect dispositioning,
patented PSM technology, and physics-based TCAD suite of simulation
products. Synopsys takes a systematic approach to design for
manufacturing that makes intelligent use of design and manufacturing
data throughout its entire flow to help ensure that designs at
65 nanometers (nm) and smaller geometries will achieve desired
yield goals.
Forward Looking Statements
This press release contains forward-looking statements within
the meaning of the safe harbor provisions of Section 21E of the
Securities Exchange Act of 1934, including statements regarding
the expected benefits of the collaboration between Synopsys and
Nikon to develop and deliver advanced lithography software models
and DFM enabled lithography manufacturing solutions for 45 nm
and below. These statements are based on Synopsys' and Nikon’s
current expectations and beliefs. The actual results of the collaboration
could differ materially from those implied by these statements
as a result of unforeseen difficulties encountered during the
collaboration in developing solutions for very small geometry
processes, uncertainties attendant to any new technology offering
and certain statements contained in the section of Synopsys'
Quarterly Report on Form 10-Q for the fiscal quarter ended July
31, 2006 entitled "Factors That May Affect Future Results."
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Contact:
Bernie Wood
Director of Marketing
Nikon Precision Inc.,
(650) 413-8533 phone
bwood@nikon.com |