| Nikon Announces New KrF Scanner with 25%
Higher Productivity
System will be used for manufacturing of 110 nm
or smaller devices
Belmont, California – November 11, 2004 – Nikon
continues its focus on high productivity lithography solutions
with the introduction of the NSR-S208D, an advanced KrF scanner
with 25% higher throughput and extremely low cost of ownership.
Customers can use the system for mass production of 110 nm
or smaller devices. The system combines a high NA projection
lens (0.82 NA) with a newly developed, high productivity
platform that enables dramatic improvements in alignment.
Alignment accuracy was reduced to 10 nm or less, a 33% improvement
over Nikon’s previous generation KrF scanner.
To ensure tight profile and CD control across the wafer,
Nikon designed the projection lens with the lowest aberration
and flare levels in the industry. High quality materials
and proprietary manufacturing technology provide a virtually
perfect lens. In addition, the NSR-S208D includes detailed
environment control systems to ensure the lens quality is
maintained over the life of the product. Nikon lenses are
recognized throughout the industry for their high quality
and durability.
Nikon continues to extend its leadership position with the
introduction of its sixth completely new lithography system
in the last 18 months, more than any of its competitors.
Nikon also shipped more systems overall and more advanced
ArF scanners than any of its competitors in 2003 (based on
information from Gartner Dataquest). Nikon continues to invest
in new product development, bringing more products to the
market, all with improved performance and reduced cost of
ownership.
“We continue to provide solutions for our customers’ needs” stated
Geoff Wild CEO of Nikon Precision, Inc. He continued “KrF
scanners are used for the majority of the advanced scanner
applications for 110 nm down to 65 nm. Our customers have
asked for a tool with extremely high productivity and lower
cost of ownership and we delivered just that.”
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography
with innovative products and technologies. The company is a
worldwide leader in lithography equipment for the microelectronics
manufacturing industry with more than 7,600 exposure systems
installed worldwide. Nikon offers the most extensive selection
of production-class steppers and scanners in the industry.
These products serve the semiconductor, flat panel display
(LCD) and thin-film magnetic head (TFH) industries. Nikon Precision
Inc. provides service, training, applications and technical
support, as well as sales and marketing for Nikon lithography
equipment in North America. For more information about Nikon,
access our web site at www.nikonprecision.com
Forward Looking Statements
This press release contains forward-looking statements as that
term is defined in the Private Securities Reform Act of 1995,
which are subject to known and unknown risks and uncertainties
that could cause actual results to differ materially from those
expressed or implied by such statements. Such statements are
subject to risks, uncertainties and changes in condition, particularly
those related to industry requirements and other risks. The
Company undertakes no obligation to update the information
in this press release.
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Contact:
Bernie Wood
Director of Marketing
Nikon Precision Inc.,
(650) 413-8533 phone
bwood@nikon.com |