Nikon i-line systems deliver the superior performance
and cost advantage you expect from the world's lithography leader. Our
i-line solutions provide optimal resolution with the lowest
cost of ownership. The Nikon scan-field steppers use the same reduction
ratio and exposure field size as our Deep UV scanners, making mix-and-match
with DUV systems easy and cost-effective. This eliminates traditional overlay matching issues, while requiring fewer exposures.
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NSR-SF155
