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The Nikon NSR-S210D KrF scanner and NSR-S310F ArF scanner are sophisticated “dry” lithography systems that meet your most rigorous resolution, overlay, and productivity requirements. The S310F and S210D adopt the same platform as the NSR-S610C immersion scanner, using the Tandem Stage to deliver superior performance and extremely high throughput - with excellent cost of ownership.
A high productivity ArF scanner for critical 65 nm applications   A high productivity KrF scanner for sub-critical layers




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