Nikon Precision | Global Site


	Litho Enhancement Paks QUICKpak SHARPpak SMARTpak GEMpak Individual Upgrades

NSR/GOCS (GEM Online Control System) is communication control software layered on the NSR/MCSV machine software and allows NSR system operation to be automated and controlled by a customer developed host control system. Nikon offers GEMpak as an optional upgrade that will further standardize your on-line messaging, and simplify message development and integration across the fab.

Carrier Management Service (CMS) Function - E87	CMS is responsible for five types of state models for the carrier management.
Job Cascade	Enables simultaneous execution of lot preparation functions, reducing the time between Jobs and thereby improving NSR productivity and efficiency. (Supports the PJM function)
Process Job Management (PJM) Function -E40	Ensures that the material delivered to the processing resource is processed with the correct recipe reducing unnecessary rework due to erroneous processing
Reticle and POD Management (RPMS) Function - E109	This describes the tracking function for the reticle’s state, or transportation state within the NSR.
Specification for Substrate Tracking (STS) Function - E90	STS provides information on the wafer’s processing state, or transportation state within the NSR.

GEMpak standardizes online messaging and simplifies 300 mm fab automation. GEMpak also includes the Job Cascade function for optimized fab productivity and efficiency.