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We realize the criticality of maximizing stepper and scanner lifetimes with minimal cost. Therefore, Nikon offers a variety of stepper and scanner hardware modifications that will extend the performance of your existing equipment on to next-generation manufacturing applications and accommodate shifts in fab objectives, including conversions for LED manufacturing. In addition, to reduce costs for our customers, we also offer competitively priced new and used stepper and scanner replacement components. |
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Inquiry
| Nikon Modification |
Description |
Applicability |
| 6" to 5" Reticle Loader Conversion Kit |
6 inch to 5 inch reticle loader conversion kit. Includes reticle library and microscopes. |
Nikon i9 and i11 |
| 5" to 6" Reticle Loader Conversion Kit |
5 inch to 6 inch reticle loader conversion kit. Includes reticle library and microscopes. |
Nikon i9 and i11 |
| LED Manufacturing Conversion |
Sapphire conversion kit to support LED manufacturing. Kits available for 3, 4, and 6 inch applications. |
Nikon i11, i12, 4425i, and i14 |
| Wafer Loader Type 3 Robot – NEW |
Left/right handed wafer loader type 3 (WL-3) robot. |
Nikon i12 and i14 |
| VAX Station Computer |
Replacement VAX Station computer and expansion unit. |
Nikon i11 and i12 |
| Wafer Loader Type 2 |
Right handed wafer loader type 2 (WL-2). Includes necessary cables, PCBs, and 8" notch chuck. |
Nikon i9, i11, and 4425i |
| Legacy Equipment Spare Parts – NEW |
A variety of parts that may not be available in the future due to supplier obsolescence or slowing demand. Please inquire for details. |
Nikon g-line systems, i6-i11, EX8, EX12, TFH-i12, and S201. |
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Stepper and Scanner Upgrades
