Nikon is committed to providing new and innovative
solutions to enhance the imaging and overlay performance of existing
systems beyond their specified levels, in addition to developing continuous
productivity and efficiency optimization solutions. We are pleased to offer four
software packages, known as Litho Enhancement Paks, which include: QUICKpak
for productivity and efficiency enhancements, SMARTpak for intelligent
overlay optimization, SHARPpak for imaging optimization, and GEMpak
for factory automation.
Purchase of a full package provides a variety of benefits over purchasing
singular software items. Suite pricing is reduced compared to the individual
options, and the stream-lined pak upgrade process minimizes the impact
to the manufacturing line. Various options included within the LithoPaks
are available on other NSR models/software versions as well.
Further information
is available upon request. For the U.S., contact accountsupport@nikon.com.
For Europe, contact: accountsupport@npeurope.com.
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Litho
Enhancement
