High throughput scan-field stepper
Nikon was first in the industry to develop a new concept i-line
stepper specifically
for mix-and-match with DUV scanners. With throughput of ≥ 120 WPH, the fifth generation scan-field stepper — the NSR-SF140, is a cost-effective system for sub-critical layers of next-generation memory and microprocessors.
Ideal for mix-and-match applications
Historically, a common problem when using steppers and scanners
in the same process flow was matching the field sizes. The
SF140 makes use of leading-edge lens technology to enable the
same wide exposure field (26 x 33 mm) as KrF and ArF scanners,
simplifying mix-and-match applications while maximizing productivity.
Optimum lens stability using the industry’s
most advanced lens design
The SF140 uses the highly advanced Nikon lens controller to fine
tune lens performance real time, as well as adjust for aberration
change due to atmospheric pressure changes and compensate for
aberration changes due to irradiation. This system also delivers
enhanced magnification compensation and reduced lens distortion.
Excellent cost of ownership
The SF140 delivers high throughput on a cost-effective platform,
resulting in low cost of ownership
(COO) for i-line
applications. Also, a stepper is a much simpler system than
a scanner, resulting in higher uptime, lower capital costs,
and reduced operating costs. Together, these elements make
the SF140
an effective solution
for sub-critical layers.
|
NSR-SF155
