Ultra-high throughput
The NSR-SF150 is the sixth generation SF system. The groundbreaking SF150 design
increases throughput by more than 50% over the previous generation stepper.
The new wafer exchange system with optimized load and unload positioning reduces
wafer exchange time by 60%, while the lightweight, high-acceleration wafer
stage shortens stepping time by nearly a third. In addition, alignment times
are halved using enhanced alignment processing speed. These design innovations
enable the SF150 to deliver more than 180 wafers (300 mm) per hour.
Ideal for mix-and-match applications
The new Nikon SF150 system makes use of leading-edge lens manufacturing
technology to enable the same wide exposure field as KrF and
ArF scanners (26 x 33 mm), simplifying mix-and-match applications
while improving productivity.
Optimum stability with new lens technology
Nikon Skyhook Technology suspends the SF150 lens module from
the main body. This eliminates any influence of ground or stage
vibration on the lens or associated metrology. The lens positioning
is intelligently controlled using non-contact actuators. In addition
to reducing vibration, Skyhook Technology provides ample space
to optimize airflow and temperature control, which improves lens
stability. Comprehensive environmental controls ensure lens quality
is maintained over the lifetime of the tool, providing excellent
long term imaging performance.
Excellent overlay accuracy
SF150 overlay accuracy is tightened by nearly 30% over the previous
generation system through lens and stage improvements. Lens enhancements
include Skyhook Technology, which reduces vibration to ensure
lens stability. In addition, the new SF150 stage design provides
enhanced positioning control and six degrees of freedom for wafer
stage control to further enhance overlay performance. The SF150
also incorporates the advanced FIA alignment system that is used
on leading-edge Nikon scanners. The SF150 delivers overlay accuracy
of ≤ 25 nm, exceeding the requirements for today’s
sub-critical layers.
Low cost of ownership for i-line applications
The SF150 delivers a 25% reduction in cost of ownership compared
to the previous generation SF140. This stepper delivers over
180 wafers per hour on a cost-effective platform. The SF150 successfully
combines a cutting-edge stage design and Skyhook Technology to
deliver superior performance and low cost of ownership
for i-line applications.
Extendible platform
Nikon understands that customers require continuous improvements
to productivity and on-going enhancements to system performance.
Therefore, the SF150 was intelligently designed to be field
upgradeable and Nikon offers chargeable upgrades
to further increase existing system’s throughput to match SF155 capabilities.
The SF150 will not only meet today’s manufacturing
requirements, but future cost-effective field upgrades will
make these systems useful for several product generations to
come.
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NSR-SF155
