Nikon Precision | Global Site


	Litho Enhancement Paks QUICKpak SHARPpak SMARTpak GEMpak Individual Upgrades

Fab productivity is increasingly important, especially in the litho sector where equipment costs are the greatest. With today’s ArF scanners costing more than $20 million, it is vital that every system is producing the maximum number of good wafers every day. Nikon recognized this requirement for our customers and is pleased to offer our QUICKpak enhancement suite. QUICKpak is a compilation of a variety of software functions specifically designed to improve productivity by enabling the most efficient use of the system.

Extended Exposure Log Analysis	Provides detailed exposure parameter data for each lot, enabling in-depth engineering analysis for quick identification of possible system or process issues.
Files Command Function	Provides a simple methodology for fast and accurate file transfer across NSRs within the fab. Includes verification tasks to avoid unwanted file overwrites.
Job Cascade	Enables simultaneous execution of lot preparation functions, reducing the time between Jobs, and thereby improving NSR productivity and efficiency.
Particle Check Using Reference Map	Smarter detection of reticle particles will reduce assist frequency and the associated corrective measures.
Substitute Search Mark Function	Reduces the occurrence of search errors that require operator assistance and result in lost productive time.

Lot overhead time reduction achieved using QUICKpak’s Job Cascade Function