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Within the current manufacturing environment, the key to being successful is not to work harder, but to work smarter. To this end, Nikon offers the SMARTpak enhancement suite. SMARTpak includes a variety of software options that enable intelligent overlay optimization. These enhanced overlay capabilities will reduce costly rework and improve product yield. In today’s business climate, such benefits are invaluable.
Grid Compensation for
Matching - GCM		 Minimizes shot placement errors between layers exposed on NSRs as well
as other scanner types, thereby delivering enhanced overlay.
Distortion Matching for
Reticle Stage - DIMARS		 Optimizes overlay performance by providing enhanced compensation for
shot shape differences using the reticle stage.
Overlay Evaluation
Program - OLEV		 OLEV enables vital alignment and overlay analysis/optimization on an off-line
PC, providing enhanced NSR productivity while delivering enhanced overlay
accuracy and increased yield.

The SMARTpak GCM function can be used to dramatically reduce the shot placement errors between layers exposed on NSRs as well as other scanner types.




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