Used Equipment | Nikon Precision

Acquiring used steppers and scanners can be a complicated process that involves tradeoff between cost and risk. In addition, buying lithography equipment from a third party introduces uncertainty with regard to system de-installation and shipment procedures, maintenance and storage conditions, as well as installations by non-OEM service providers. These variables expose your fab to potential performance issues, delays in ramp-up, and cost overruns.

As a solution to manage these risks, we are pleased to provide the highest quality used Nikon steppers and scanners, with a variety of flexible used equipment programs available to enable fabs to acquire and install lower-priced used lithography equipment.

Used Nikon Steppers and Scanners for Sale

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Nikon Equipment Model	Description	Used Equipment Details
Nikon Body 11 (B-11) NSR-2205i11D	Nikon i-line lithography stepper	Supports 8" notched wafers; includes wafer loader type 2 and pre-alignment2 system; right inline configuration; includes extended reticle library; low altitude setup.
Nikon Body 11 (B-11) NSR-2205i11D	Nikon i-line lithography stepper	Supports 8" notched wafers; includes wafer loader type 2 and pre-alignment2 system; right inline configuration; includes extended reticle library; low altitude setup.
Nikon TFH EX14 NSR-2205EX14C TFH	Nikon DUV KrF lithography stepper for TFH applications	Supports 6" flat wafers; silicon conversion kit available.
Nikon S203 & Cymer ELS-5410 NSR-S203B scanner and Cymer laser	Nikon DUV KrF lithography scanner	Supports 8" notched wafers; includes pre-alignment2 system; includes reticle barcode reader; left inline configuration; Cymer 1000Hz laser.
Nikon S205 & Cymer ELS-6410 NSR-S205C scanner and Cymer laser	Nikon DUV KrF lithography scanner	Supports 8" notched wafers; includes pre-alignment2 system; includes reticle barcode reader; left inline configuration; Cymer 2500Hz laser.

Systems listed above include guaranteed installation specifications, and 6 month warranty with preventative maintenance (PM) contract. Complete system performance data available upon request. In addition, there are other i9/i11/i12 steppers, as well as S204/S205/S307 scanners available with special guaranteed installation specification programs and 6 month warranty programs offered with purchase of a PM contract.

This Nikon used equipment list is updated frequently, but is subject to change without notice. Equipment is either sold directly by, or brokered through, Nikon Precision. If the system you require is not shown, please submit an inquiry or contact your local Key Account Manager.

Nikon Used Equipment Programs

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Programs	Benefits
Nikon Certified Used Equipment	Refurbished with genuine Nikon parts Installed and tuned by Nikon engineers Guaranteed to meet Nikon standard specifications Operator and maintenance training included Six-month parts and labor contract
Used Equipment with Nikon Support	Installed by Nikon Engineers Performance targets and/or limited guarantees Three-month parts and labor after sales support
Used Equipment from Third Parties	Inspection and evaluation program is available prior to purchase Installed by Nikon engineers Best effort performance targets
Other Support Programs	System inspection and characterization by Nikon either pre-sale or in preparation for sale by you Complete system de-installation and relocation services Modifications available including wafer/reticle size conversions Remarketing and trade-in capabilities



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