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Contact training@nikon.com for class schedules and availability.
System Operation/Preventive Maintenance
5 day course
The NSR-SX05/SX06 System Operation/Preventive Maintenance course is
a five-day class that instructs the students on system operations and
daily, weekly and monthly preventive maintenance procedures required
to maintain optimum performance on the SX05/SX06 series systems. This
training course is designed for persons who will be required to maintain
the SX05/SX06 systems in a wafer fabrication area. This course also teaches
operations theory and procedures for checking, cleaning, lubricating
and adjusting system components. The course is designed for students
who have at least three months experience with scanners.
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Advanced System Operation
5 day course
The Advanced System Operation course is a five-day class that instructs the students
on topics regarding data file creation and editing. It also covers System Parameters,
Adjust Machine, and emphasizes Alignment and Auto-Focus/Leveling Optimization.
This course is designed for personnel who will be required to create and edit
files, maintain system parameters and optimize alignment and image quality on
the NSR Scanner. The NSR Scanner Series Advanced System Operation course is designed
to assist system technicians and engineers in the advanced operation procedures
of the NSR system.
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NSR-SX05/SX06/SX07
Engineering Theory
5 day course
The NSR-SX05/SX06/SX07 Advanced Theory course is a five-day class
that introduces the SX05/SX06/SX07 controls, software and operating
procedures essential for the use of the SX05/SX06/SX07 systems.
The student will learn system and sub-system overview, system initialization,
system configuration, software for system operation, reticle loading
and aligning, first and second level wafer exposure and utility
functions. Students will also be familiarized with commonly used
SX05/SX06/SX07 terms and phrases. Enrollment in this course is
limited to five students.
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Module
A WL/RL
3 day course
The NSR-SX05/SX06/SX07 Module A course is a three-day class that
instructs the students on advanced theory, as well as daily, weekly
and monthly preventive maintenance procedures required to maintain
optimum performance on the wafer loader and reticle loader subsystems.
Enrollment is limited to five students per class. The student will
learn advanced theory and procedures for checking and adjusting
the wafer loader and reticle loader sub-systems. These procedures
are required to maintain optimum performance in a production environment.
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Module
B WS/RS
5 day course
The NSR-SX05/SX06/SX07 Module B course is a five-day class that instructs
students on theoretical knowledge and advanced preventive maintenance
procedures required to maintain optimum performance on the wafer
stage and the reticle stage. Enrollment is limited to five students
per class. The student will understand advanced theory and procedures
associated with the AVIS system, wafer stage, reticle stage and interferometer
theory and construction. The student will also be capable of performing
checks and adjustments necessary to maintain the wafer stages and
reticle stages. These procedures are required to maintain optimum
performance in a production environment.
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Module
C WA/RA
2 day course
The NSR-SX05/SX06/SX07 Module C course is a two-day class that instructs
students on advanced theory and adjustment procedures for Nikon wafer
and reticle alignment systems. This course is designed for maintenance
personnel required to maintain optimum performance of the NSR. The
student will understand theory and procedures for checking and adjusting
the wafer and reticle alignment subsystems incorporated on the NSR-SX05/SX06/SX07.
This information is required to maintain optimum performance in a
production environment.
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Module
D AF/IL
5 day course
The NSR-SX05/SX06/SX07 Module D course is a five-day class that
instructs students on advanced theory and adjustment procedures
for Nikon auto focus, aerial image sensor, and illumination sub-systems.
This course is designed for maintenance personnel required to
maintain optimum performance of the NSR. Enrollment is limited
to five students per class. The student will understand theory
and procedures for checking and adjusting the auto-focus system,
aerial image sensor and illumination systems incorporated on
the NSR-SX05/SX06/SX07. This information is required to maintain
optimum performance in a production environment.
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NSR-SX08
