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Contact training@nikon.com for class schedules and availability.
NSR-S208D/S308F Engineering Theory
5 day course
The Engineering Theory course is a five day class that instructs the students on the configuration and theory of the scanner. The student will learn NSR design and cleanroom layout differences from the previous NSR scanner series, as well as component design and construction. Students will learn computer layout and communications control. Enrollment is limited to six students per class.
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NSR-S208D/S308F System Operations and Preventive Maintenance (PM)
10 day course
The NSR-S208/S308 System Operations and Preventive Maintenance (PM) course is a ten-day course. This course introduces the student to NSR-S208/S308 Operations & System functions and instructs the students in preventive maintenance procedures required to maintain optimum performance on the S208/S308 series systems. This course provides instruction in system functions and procedures for checking, cleaning and adjusting system components. The course is designed for persons who will be required to maintain the S208/S308 systems in a wafer fabrication area.
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NSR-S208D/S308F System and Data file Management
3 day course
The System and Data File Management course is a three day (7 hour a day) class that instructs the students on theory and use of wafer and reticle alignment, auto-focus and focus calibration management and data file creation and editing using a MCSW Simulator. It also covers System Parameters, Adjust Machine, and exposure and resolution principles. This course is designed for personnel who will be required to create and edit files, maintain system parameters and optimize alignment and image quality on the system. Enrollment in this course is limited to six students.
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NSR-S208D/S308F Chamber and Wafer Loader Advanced Maintenance
5 day course
The NSR-S208/S308 Chamber and Wafer Loader Advanced Maintenance Course is a five day course. In this course the students learn how to perform procedures used in performing maintenance and testing of the chamber and wafer loader sub-systems. The students will also be instructed in the reasons for, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the sub-systems. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
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NSR-S208D/S308F Main Body, Active Vibration Isolation System (AVIS), Wafer Stage, Reticle Stage, and Reticle Loader Advanced Maintenance
10 day course
The NSR-S208/S308 Main Body, AVIS, Wafer Stage, Reticle Stage, and Reticle Loader Advanced Maintenance course is a ten day course. In this course the students learn how to perform procedures used in maintenance and testing of these four sub-systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the four sub-systems. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
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NSR-S208D/S308F Wafer Alignment, Reticle Alignment, and Alignment Autofocus Advanced Maintenance
10 day course
The NSR-S208/S308 Reticle Alignment, Wafer Alignment, and Alignment Autofocus Advanced Maintenance Course is a ten day course. In this course the students learn to perform all procedures used in performing maintenance and testing of these three sub-systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the three systems. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
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NSR-S208D/S308F Autofocus and Aerial Image Sensor (AIS) Advanced Maintenance
5 day course
The NSR-S208/S308 Autofocus and AIS Advanced Maintenance Course is a five day class. In this class the students learn to perform procedures used in performing maintenance and testing for both systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the two sub-systems. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
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NSR-S208D/S308F Illumination Advanced Maintenance
5 day course
The NSR-S208/S308 Illumination Advanced Maintenance Course is a five day class. In this class the students learn to perform procedures used in maintenance and testing of the Illumination System. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the Illumination system. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
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NSR-SX10
