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Contact training@nikon.com for class schedules and availability.
System Operation
2 day course
The System Operation course is a two-day class that introduces
the NSR controls, software and operating procedures essential for
the use of an NSR system. The student will learn system initialization,
system configuration, software for system operation, reticle loading
and aligning, and first and second level wafer exposure and utility
functions. Students will also be familiarized with commonly used
NSR terms and phrases. |
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Advanced System Operation
3 day course
The Advanced System Operation course is a three (3) day class
that instructs the students on topics regarding data file creation
and editing. It also covers System Parameters, Adjust Machine and
Alignment Optimization. This course is designed for personnel who
will be required to create and edit files, maintain system parameters
and optimize alignment. |
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Service Level 1
4 day course
The Service Level 1 course is a four-day class that instructs
the students on daily, weekly and monthly preventive maintenance
procedures required to maintain optimum performance on the NSR-11/12
Series system. The Service Level 1 teaches theory and procedures
for checking, cleaning, lubricating and adjusting system components.
This training course is designed for persons who will be required
to maintain the NSR-11/12 Series system in a wafer fabrication
area. |
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Service Level 2
5 day course
The Service Level 2 course is a five-day course that teaches the
student advanced service procedures to achieve optimum performance
and reduce downtime of the NSR-11/12 Series system. This training
course is designed for persons who will be required to maintain
the Nikon stepper in a wafer fabrication area. This course must
be satisfactorily completed prior to attending the Advanced Service
modules to provide a detailed understanding in the main areas of
service on the NSR. The student will be able to troubleshoot NSR
problems. The course materials include detailed operation flow
charts, functional block diagrams, signal paths and troubleshooting
guidelines. |
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Wafer Loader Type 2
2 day course
The Wafer Loader Type 2 Advanced Service Training course is a
two (2) day class that provides hands-on instruction in electrical
and mechanical adjustment techniques used to service this subsystem.
The student will learn the theory and advanced procedures for checking
and adjusting the component parts of the Wafer Loader Type 2 sub-system. |
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Wafer Loader Type 3
3 day course
The Wafer Loader Type 3 Advanced Service Training course is a
three (3) day class that provides hands-on instruction in electrical
and mechanical adjustment techniques used to service this subsystem.
The student will learn the theory and advanced procedures for checking
and adjusting the component parts of the Wafer Loader Type 3 sub-system. |
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Wafer Stage
3 day course
The NSR Wafer Stage Service Advanced training course is a three-day
course which provides hands-on practice in electrical and mechanical
adjustment techniques used to service the Wafer Stage subsystem.
Students will learn how to quickly and correctly diagnose stepping
errors and fine-tune lead-screw backlash and thrust bearing adjustments.
Students will learn the theory and procedures for checking and
adjusting the components of the Wafer Stage subsystem, wafer holder
replacement and receive in depth knowledge of stage construction.
These procedures are required to maintain optimum performance when
the NSR is used intensively in production. |
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Wafer Alignment
4 day course
The Wafer Alignment course is a four (4) day class that instructs
students on theory of operation and how and when to adjust Nikon
wafer alignment systems. This course is designed for persons required
to maintain optimum performance of the NSR. The student will learn
the theory and adjustments for optimizing the wafer alignment subsystem. |
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Multi Point Auto Focus
2 day course - by request only
The Multi Point Auto Focus course
is a two (2) day class that provides hands-on experience in electrical,
mechanical, and optical adjustment techniques for the Multi Point
Auto Focus sub-system. This course is designed for experienced
technicians responsible for maintaining optimal performance of
the NSR in a wafer fabrication environment. The student will
understand the basic theory associated with the Multi Point Auto
Focus sub-system. The student will be capable of performing the
checks and adjustments necessary to maintain the NSR Multi Point
Auto Focus sub-system. |
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Reticle Loader and Alignment
4 day course
This four (4) day class provides hands-on experience
in electrical, mechanical, and optical adjustment techniques
for the Reticle Loader, the Reticle Stage, and the Reticle Alignment
sub-systems. This course is designed for experienced technicians
responsible for maintaining optimal performance of the NSR in
a wafer fabrication environment. The student will understand
the basic theory associated with the Reticle Loader, Reticle
Stage, and the Reticle Alignment systems. The student will be
capable of performing the checks and adjustments necessary to
maintain the NSR Reticle Loader, Reticle Stage, and Reticle Alignment
systems. |
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llumination System
4 day course - by request only
The Illumination System Advanced Service
training course is a four-day course that provides hands-on practice
in electrical and mechanical adjustment techniques used to service
the Illumination subsystem. This course is designed for experienced
technicians responsible for maintaining optimal performance of
the NSR in a wafer fabrication environment. Students will learn
the theory of operation of specified components of the Illumination
system and hands-on procedures involving checking and adjusting
the Illumination subsystem. |
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Phototest
By request only |
NSR-SX08
