JSR selects Nikon S305C and S306B for ArF Resist Development
Belmont, Calif., March 1, 2002 — Nikon Precision Inc. (NPI), the North American lithography subsidiary of Nikon Corporation, Japan, and JSR Microelectronics, USA announced today that they have reached agreement on JSR’s purchase of two Nikon ArF Scanners. One of the units, the S305C, will be installed in JSR’s 193nm development center in Sunnyvale, CA. The second unit, a S306B, will be installed in JSR’s 193nm research center in Yokkaichi, Japan. JSR will use these systems for ArF resist design and process development and optimization. The tools will also be available to customers and prospective customers of both Nikon and JSR for process development.
JSR chose the Nikon scanner for its field proven performance as well as its configuration and alignment flexibility. The S305 was shipped and installation begins immediately. The S306 will ship and install in mid 2002. JSR will hold tours of their Sunnyvale manufacturing and applications facilities during this year’s SPIE Symposium
Eric Johnson, Sr. Vice President at JSR Microelectronics said “We look forward to using this leading edge lithography system in our development work. JSR has had experience with NPI and I am sure that this will be a very productive and beneficial relationship.”
Sean McNamara, VP of Applications at Nikon Precision said, “This is a great opportunity for us to work closely with JSR to develop advanced best known methods for our leading edge equipment under working conditions. We are pleased to have such a relationship with one of the leading resist companies.”
Nikon Precision Inc. is the North American subsidiary of Nikon Corp., the world leader in lithography equipment for the microelectronics manufacturing industry with more than 6,900 units installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the wafer, photomask, flat panel display and thin-film magnetic head industries. Nikon Precision provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.
JSR Microelectronics is the North American subsidiary of JSR Corporation based in Tokyo, Japan. JSR is a prominent materials supplier to the microelectronics, flat panel display, and fiber optics manufacturers. JSR is a leader in photolithographic materials and has been active in the US market since 1990. The Sunnyvale facility has been manufacturing photoresist since 1997 and is slated for expansion to accommodate 248nm and 193nm materials manufacturing requirements this year.
Nikon Precision Inc.
JSR Microelectronics Inc.
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