Nikon Introduces Ultra-High NA ArF Scanner for 100 nm Design Rules. System Achieves New Levels of Throughput and Accuracy
Belmont, California, June 27, 2001 -Nikon Precision Inc. (NPI) has announced its fourth-generation lens-based 193 nm scanner designed to meet the stringent manufacturing requirements for 100 nm semiconductor devices. Called the S306C, the new system is the world’s first argon fluoride (ArF) scanner to incorporate a 0.78 ultra-high numerical aperture (NA) lens. It achieves a throughput of more than 135 – 200 mm wafers per hour and over 85 – 300 mm wafers per hour, making it one of the highest productivity tools in the industry.
Nikon has led the stepper and scanner market for over 15 years. “The Nikon S306C is designed to meet the rigid requirements for next-generation DRAMS and logic devices,” states Frank Masciocchi, vice president of sales and marketing for NPI. “The introduction of this new scanner will cement our continuing role as the technical and market leader,” he added.
The S306C, a 1:4 reduction system, achieves a resolution of 120 nm. By utilizing SHRINC, Nikon’s illumination and resolution enhancement technology, it realizes a resolution of 100 nm or better. The system’s three-sigma alignment accuracy is better than 23 nm. The effects of vibration and temperature on operation are minimized by the newly developed body. Nikon will begin accepting orders for the new system in spring 2002.
Nikon Precision Inc. is the North American subsidiary of Nikon Corporation, the world leader in lithography equipment for the microelectronics manufacturing industry with more than 6,800 units, including over 400 lens-based scanners, installed worldwide. Nikon assures the success of its customers by offering the most extensive selection of production-class steppers and scanners in the industry. These products serve the wafer, photomask, flat panel display and thin-film magnetic head industries. Nikon Precision provides service, applications, training, technical support, sales and marketing for Nikon in North America.
Nikon Precision Inc.