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Nikon Precision | USA & Europe

 

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iAS and LithoBooster

Nikon understands that it is real-world, on-product performance and productivity that are vital to chipmakers. We have developed two revolutionary products specifically focused on optimizing alignment in order to enable cost-effective lithography scaling.

The pioneering inline Alignment Station (iAS) is a high speed, extremely accurate wafer pre-measurement module that can be integrated between the coater/developer and NSR-S631E or S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer, delivering better alignment and overlay—with no impact on throughput. iAS capabilities can be extended to other scanners in the fab with the LithoBooster Standalone Alignment Station. In addition to delivering wafer-by-wafer feed forward corrections, LithoBooster also provides an open platform for expanded overlay, autofocus, and process control solutions.

iAS and LithoBooster enable chipmakers to meet the ever-tightening overlay and edge placement error (EPE) requirements for leading-edge semiconductor manufacturing.

Nikon. Delivering Real-world Solutions.

inline Alignment Station (iAS)

Delivers world-class device patterning and productivity for 7 nm node applications and beyond

Learn about the inline Alignment Station (iAS)

LithoBooster Standalone Alignment Station

Maximizes productivity and yield with Standalone Alignment Station

Learn about the LithoBooster Standalone Alignment Station

 

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Products and Technology

  • Immersion and Multiple Patterning
  • Deep UV
  • i-Line
  • Steppers for MEMS, LEDs, and Packaging Markets
  • iAS and LithoBooster
    • NSR-S631E with inline Alignment Station (iAS)
    • LithoBooster Standalone Alignment Station
  • Used Equipment
  • Upgrades and Modifications

NIKON PRECISION INC.
NIKON PRECISION EUROPE GMBH


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