- Course TitleIllumination System
- Number of Days4
- Course Description
By request only
The Illumination System Advanced Service training course is a four-day course that provides hands-on practice in electrical and mechanical adjustment techniques used to service the Illumination subsystem. This course is designed for experienced technicians responsible for maintaining optimal performance of the NSR in a wafer fabrication environment. Students will learn the theory of operation of specified components of the Illumination system and hands-on procedures involving checking and adjusting the Illumination subsystem.
- Product Series: NSR-i11/i12/EX12