- Course TitleModule B WS/RS
- Number of Days5
- Course Description
The NSR-SX05/SX06/SX07 Module B course is a class that instructs students on theoretical knowledge and advanced preventive maintenance procedures required to maintain optimum performance on the wafer stage and the reticle stage. Enrollment is limited to five students per class. The student will understand advanced theory and procedures associated with the AVIS system, wafer stage, reticle stage and interferometer theory and construction. The student will also be capable of performing checks and adjustments necessary to maintain the wafer stages and reticle stages. These procedures are required to maintain optimum performance in a production environment.
- Product Series: NSR-SX05/SX06/SX07