- Course TitleNSR-S208D/S308F Main Body, Active Vibration Isolation System (AVIS), Wafer Stage, Reticle Stage, and Reticle Loader Advanced Maintenance
- Number of Days10
- Course Description
The NSR-S208/S308 Main Body, AVIS, Wafer Stage, Reticle Stage, and Reticle Loader Advanced Maintenance course is a ten day course. In this course the students learn how to perform procedures used in maintenance and testing of these four sub-systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the four sub-systems. The NSR-S208/S308 System Operations and Preventive Maintenance Course is a prerequisite for this course.
- Product Series: NSR-SX08