- Course TitleNSR-S210D/S610C Chamber, Wafer Loader, and Reticle Loader Advanced Maintenance
- Number of Days5
- Course Description
The NSR-S210D/S610C Chamber, Wafer Loader, and Reticle Loader Advanced Maintenance Course is a five day course. In this course students learn to perform procedures used in maintenance and testing of the Chamber, Wafer Loader, and Reticle Loader sub-systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the sub-systems. The NSR-S210D/S610C System Operations and Preventive Maintenance Course is a prerequisite for this course.
- Product Series: NSR-SX10