- Course TitleNSR-S210D/S610C Main Body, Active Vibration Isolation System (AVIS), Wafer Stage, and Reticle Stage Advanced Maintenance
- Number of Days5
- Course Description
The NSR-S210D/S610C Main Body, AVIS, Wafer Stage, and Reticle Stage, Advanced Maintenance course is a ten day course. In this course the students learn to perform procedures used in maintenance and testing of these three sub-systems. The students will also be instructed in the reasons, theory and sequence of procedures being performed. The course includes an overview of some of the more commonly experienced malfunctions associated with the three sub-systems. The NSR-S210D/S610C System Operations and Preventive Maintenance Course is a prerequisite for this course.
- Product Series: NSR-SX10