- Course TitleWafer Stage
- Number of Days3
- Course Description
The NSR Wafer Stage Service Advanced training course provides hands-on practice in electrical and mechanical adjustment techniques used to service the Wafer Stage subsystem. Students will learn how to quickly and correctly diagnose stepping errors and fine-tune lead-screw backlash and thrust bearing adjustments. Students will learn the theory and procedures for checking and adjusting the components of the Wafer Stage subsystem, wafer holder replacement and receive in depth knowledge of stage construction. These procedures are required to maintain optimum performance when the NSR is used intensively in production.
- Product Series: NSR-i11/i12/EX12