Introducing the NSR-S333F ArF Scanner–Now Open for Orders Starting in October
Tokyo, Japan – September 25, 2025 – Nikon Corporation announces the launch of its latest ArF scanner, the NSR-S333F, which delivers industry-leading overlay accuracy*¹ alongside exceptional productivity. Built on the advanced platform of the flagship ArF immersion scanner NSR-S636E and improving upon the proven ArF optics of the NSR-S322F, the NSR-S333F simultaneously achieves both high throughput with overlay precision. Designed to support fine patterning across a wide range of devices including logic, memory, and image sensors, Nikon will start accepting orders for the NSR-S333F beginning in October 2025, with initial deliveries expected to start in the second half of 2026.
*1: Among ArF scanners announced as of September 25, 2025. According to Nikon research.
Development Background
As the rise of IoT and AI accelerates, the demand for ever smaller, higher-performance semiconductor devices increases. From advanced logic chips to next-generation memory and high-resolution image sensors, manufacturers are under increasing pressure to achieve tighter overlay accuracy and higher productivity. To meet these demands, Nikon developed the NSR-S333F to deliver both exceptional productivity with precision accuracy.
Key Benefits
1. Significant Improvement in Throughput by Platform Enhancement
The NSR-S333F builds on the advanced platform of Nikon’s flagship ArF immersion scanner, the NSR-S636E. By increasing the speed of both the wafer stage and reticle stage, the system achieves a throughput of over 300 wafers per hour*2. Operational stability has also been additionally optimized, resulting in approximately 1.5x higher productivity compared to the previous model, the NSR-S322F*3.
*2: For 300 mm wafers, 96 shots.
*3: May vary depending on operating conditions, etc.
2. Achieves Industry-Leading Overlay Accuracy
By enhancing the proven optical system of previous ArF scanners and combining with the advanced platform of the ArF-S636E, the NSR-S333F features improved performance in key areas such as wafer alignment measurement, reticle stage measurement, and autofocus, and delivers industry-leading overlay accuracy (MMO*4≤ 4nm), setting a new standard for ArF scanners.
*4: Mix and Match Overlay. Overlay accuracy between the same model (e.g., NSR-S333F#1 to NSR-S333F#2).
Performance Overview
| Resolution | ≦ 65 nm |
| NA (numerical aperture) | 0.92 |
| Light Source | ArF excimer laser (193 nm wavelength) |
| Reduction Ratio | 1 : 4 |
| Maximum Exposure Area | 26 mm x 33 mm |
| Overlay Accuracy | MMO: ≦ 4 nm |
| Throughput | ≧ 300 wafers / hour (96 shots) |
The information contained in this press release is current as of its date of publication.
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in semiconductor lithography systems for the microelectronics manufacturing industry with more than 8,000 (semiconductor) lithography systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (FPD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our website at https://www.nikonprecision.com.
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This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
For further information, please contact:
Nikon Precision Marketing Communications at:
NPIcom@nikon.com