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Refurbished Equipment

Refurbished Equipment

Acquiring used steppers and scanners can be a complicated process that involves tradeoff between cost and risk. In addition, buying lithography equipment from a third party introduces uncertainty with regard to system de-installation and shipment procedures, maintenance and storage conditions, as well as installations by non-OEM service providers. These variables expose your fab to potential performance issues, delays in ramp-up, and cost overruns.

As a solution to manage these risks, we are pleased to provide the highest quality used Nikon steppers and scanners, with a variety of flexible used equipment programs available to enable fabs to acquire and install lower-priced used lithography equipment.

Acquiring used steppers and scanners can be a complicated process that involves tradeoff between cost and risk. In addition, buying lithography equipment from a third party introduces uncertainty with regard to system de-installation and shipment procedures, maintenance and storage conditions, as well as installations by non-OEM service providers. These variables expose your fab to potential performance issues, delays in ramp-up, and cost overruns.

As a solution to manage these risks, we are pleased to provide the highest quality used Nikon steppers and scanners, with a variety of flexible used equipment programs available to enable fabs to acquire and install lower-priced used lithography equipment.

 


Used Nikon Steppers and Scanners for Sale

Used Systems brokered through Nikon Precision include guaranteed installation specifications, customer training, and warranties with ongoing preventative maintenance (PM) contracts. The Nikon Used Equipment list is updated frequently, but is subject to change without notice. Please submit an inquiry or contact your local Key Account Manager for more information.

Nikon Used Equipment Solution Examples (for Reference Only)

 i-line
(365 nm wavelength)
KrF
(248 nm wavelength)
ArF
(193 nm wavelength)
Tool TypeStepperScan Field StepperStepperScannerScanner
Lens NA (max)0.630.620.600.820.92
Resolution (nm)350280≤ 250≤ 180 ~ ≤ 110≤ 65
Overlay (nm)40down to 2540down to 9≤ 8 and below
Field Size (mm)22 x 22,
17.9 x 25.2
25 x 33,
26 x 33
22 x 22,
17.9 x 25.2
25 x 33,
26 x 33
26 x 33
Reduction5x4x5x4x4x
 

Nikon Used Equipment Programs

ProgramsBenefits
Nikon Certified Used EquipmentRefurbished with genuine Nikon parts

Installed and optimized by Nikon engineers

Guaranteed to meet Nikon standard specifications

Latest software and licensing included

Operator and maintenance training included

Parts and labor contracts provided
Used Equipment with Nikon SupportInstalled by Nikon engineers

Performance targets and/or limited guarantees

Parts and labor contracts can be provided
Used Equipment from Third PartiesInspection and evaluation program is available prior to purchase

Installed by Nikon engineers
Other Support ProgramsSystem inspection and characterization by Nikon either pre-sale or in preparation for sale by you

Complete system de-installation and relocation services

Modifications available including wafer/reticle size conversions

Remarketing and trade-in capabilities

Customizable support solutions

Outcome-based services — Applications process tuning/optimization support and tool matching programs, etc.