Used Systems brokered through Nikon Precision include guaranteed installation specifications, customer training, and warranties with ongoing preventative maintenance (PM) contracts. The Nikon Used Equipment list is updated frequently, but is subject to change without notice. Please submit an inquiry or contact your local Key Account Manager for more information.
| i-line (365 nm wavelength) | KrF (248 nm wavelength) | ArF (193 nm wavelength) |
|||
|---|---|---|---|---|---|
| Tool Type | Stepper | Scan Field Stepper | Stepper | Scanner | Scanner |
| Lens NA (max) | 0.63 | 0.62 | 0.60 | 0.82 | 0.92 |
| Resolution (nm) | 350 | 280 | ≤ 250 | ≤ 180 ~ ≤ 110 | ≤ 65 |
| Overlay (nm) | 40 | down to 25 | 40 | down to 9 | ≤ 8 and below |
| Field Size (mm) | 22 x 22, 17.9 x 25.2 | 25 x 33, 26 x 33 | 22 x 22, 17.9 x 25.2 | 25 x 33, 26 x 33 | 26 x 33 |
| Reduction | 5x | 4x | 5x | 4x | 4x |
| Programs | Benefits |
|---|---|
| Nikon Certified Used Equipment | Refurbished with genuine Nikon parts Installed and optimized by Nikon engineers Guaranteed to meet Nikon standard specifications Latest software and licensing included Operator and maintenance training included Parts and labor contracts provided |
| Used Equipment with Nikon Support | Installed by Nikon engineers Performance targets and/or limited guarantees Parts and labor contracts can be provided |
| Used Equipment from Third Parties | Inspection and evaluation program is available prior to purchase Installed by Nikon engineers |
| Other Support Programs | System inspection and characterization by Nikon either pre-sale or in preparation for sale by you Complete system de-installation and relocation services Modifications available including wafer/reticle size conversions Remarketing and trade-in capabilities Customizable support solutions Outcome-based services — Applications process tuning/optimization support and tool matching programs, etc. |
Acquiring refurbished equipment such as used steppers and scanners can be a complicated process that involves tradeoff between cost and risk. In addition, buying lithography equipment from a third party introduces uncertainty with regard to system de-installation and shipment procedures, maintenance and storage conditions, as well as installations by non-OEM service providers. These variables expose your fab to potential performance issues, delays in ramp-up, and cost overruns.
