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Hardware Modifications and Components

Hardware Modifications and Components

We realize the criticality of maximizing stepper and scanner lifetimes with minimal cost. Therefore, Nikon offers a variety of stepper and scanner hardware modifications that will extend the performance of your existing equipment on to next-generation manufacturing applications and accommodate shifts in fab objectives, including conversions for LED manufacturing. In addition, to reduce costs for our customers, we also offer competitively priced new and used stepper and scanner replacement components.


Stepper and Scanner Hardware Modifications and New/Used Components for Sale

Nikon ModificationDescriptionApplicability
6" to 5" Reticle Loader Conversion Kit6 inch to 5 inch reticle loader conversion kit. Includes reticle library and microscopes.Nikon i9 and i11
5" to 6" Reticle Loader Conversion Kit5 inch to 6 inch reticle loader conversion kit. Includes reticle library and microscopes.Nikon i9 and i11
LED Manufacturing ConversionSapphire conversion kit to support LED manufacturing. Kits available for 3, 4, and 6 inch applications.Nikon i11, i12, 4425i, and i14
Wafer Loader Type 3 Robot – NEWLeft/right handed wafer loader type 3 (WL-3) robot.Nikon i12 and i14
VAX Station ComputerReplacement VAX Station computer and expansion unit.Nikon i11 and i12
Wafer Loader Type 2Right handed wafer loader type 2 (WL-2). Includes necessary cables, PCBs, and 8" notch chuck.Nikon i9, i11, and 4425i
Legacy Equipment Spare Parts – NEWA variety of parts that may not be available in the future due to supplier obsolescence or slowing demand. Please inquire for details.Nikon g-line systems, i6-i11, EX8, EX12, TFH-i12, and S201.