Alignment Stations

Nikon understands that real-world, on-product performance and productivity are vital to chipmakers. To address ever-tightening alignment, overlay, and edge placement error (EPE) requirements, Nikon developed the Litho Booster Standalone Alignment Station, purpose-built to enable cost-effective lithography scaling.

The Litho Booster Standalone Alignment Station is a high-accuracy, high-throughput wafer alignment solution that delivers shot-by-shot feed-forward correction to scanners. By providing precise pre-measurement data, Litho Booster improves alignment and overlay performance without impacting scanner throughput.

Beyond feed-forward alignment, Litho Booster offers an open platform that enables expanded overlay control, autofocus optimization, and advanced process control solutions. This flexibility allows chipmakers to adapt Litho Booster to evolving process requirements across advanced and specialty applications. 

With Litho Booster, chipmakers gain a scalable, standalone alignment solution designed to support demanding overlay performance and manufacturing efficiency in modern semiconductor fabs.

Nikon. Technology to Do More.