In addition to delivering steppers and scanners for cutting-edge semiconductor applications, Nikon also offers a suite of advanced semiconductor inspection systems. Nikon leverages over 100 years of optical design and manufacturing expertise to deliver inspection systems to meet the most challenging post-develop and post-etch inspection requirements of today’s IC makers. Nikon also provides specialized illumination systems for image sensor inspection.
Systems provide advanced micro/macro inspection capabilities
Automatic Macro Inspection (AMI) Systems
Provide high throughput inspection of entire wafer surface
Illumination Systems for Image Sensor Inspection
Deliver high-power, ultra-uniform illumination over a large inspection field