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Semiconductor Inspection Systems

Semiconductor Inspection Systems

In addition to delivering steppers and scanners for cutting-edge semiconductor applications, Nikon also offers a suite of advanced semiconductor inspection systems. Nikon leverages over 100 years of optical design and manufacturing expertise to deliver inspection systems to meet the most challenging post-develop and post-etch inspection requirements of today’s IC makers. Nikon also provides specialized illumination systems for image sensor inspection.

Semiconductor Inspection Systems
OPTISTATION-3000 Series

Systems provide advanced micro/macro inspection capabilities.

 

Semiconductor Inspection Systems
Automatic Macro Inspection (AMI) Systems

Provide high throughput inspection of entire wafer surface.

 

Nikon Illumination Systems
Illumination Systems for Image Sensor Inspection

Deliver high-power, ultra-uniform illumination over a large inspection field.