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i-Line

i-Line 

Nikon i-Line steppers deliver the superior performance and cost advantage you expect from the world’s lithography leader. Our i-Line steppers provide optimal resolution and overlay with the lowest cost of ownership (CoO). The Nikon NSR-SF155 scan-field stepper uses the same reduction ratio and exposure field size as our Deep UV scanners. This eliminates traditional overlay matching issues while requiring fewer exposures, making mix and match with DUV systems easy and cost-effective.

Nikon i-Line Steppers

Nikon i-Line steppers deliver the superior performance and cost advantage you expect from the world’s lithography leader. Our i-Line steppers provide optimal resolution and overlay with the lowest cost of ownership (CoO). The Nikon NSR-SF155 scan-field stepper uses the same reduction ratio and exposure field size as our Deep UV scanners. This eliminates traditional overlay matching issues while requiring fewer exposures, making mix and match with DUV systems easy and cost-effective.

NSR-SF155 i-Line Stepper
NSR-SF155

Ultra-high throughput stepper incorporating Skyhook Technology.