The inline Alignment Station (iAS) and Litho BoosteriAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
SEMICON Europa is back in-person and co-located with productronica in Munich, Germany. This year’s event will be held November 16 -19. Visit Nikon Precision Europe at Booth #219 in Hall B1 to learn about our cutting-edge products and programs.
iAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
SEMICON Europa is back in-person and co-located with productronica in Munich, Germany. This year’s event will be held November 16 -19. Visit Nikon Precision Europe at Booth #219 in Hall B1 to learn about our cutting-edge products and programs.
