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Featured Product

The inline Alignment Station (iAS) and LithoBooster

iAS is a high speed, pre-measurement module that can be integrated between the coater/developer and the NSR-S631E or S635E scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the LithoBooster Standalone Alignment Station. Learn More…

Nikon eReview

Access the Latest Nikon eReview Newsletter

Nikon launched the 2018 edition featuring presentations from LithoVision, and highlighting the latest Nikon innovations and happenings.

Upcoming Events

SEMICON JAPAN

Tokyo, Japan
December 12-14, 2018

LithoVision 2019

San Jose, California
February 24, 2019

SPIE Advanced Lithography

San Jose, California
February 24-28, 2019

View More News and Events

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