The inline Alignment Station (iAS) and Litho BoosteriAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
November 15 – 18, 2022
We look forward to seeing you at SEMICON Europa, which will be co-located with electronica in Munich this year! Be sure to visit our booth.
iAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
November 15-18, 2022
We look forward to seeing you at SEMICON Europa, which will be co-located with electronica in Munich this year! Be sure to visit our booth.
