The inline Alignment Station (iAS) and Litho BoosteriAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
February 26 – March 2, 2023
Attend informative presentations by Nikon technology leaders!
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
iAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
February 26 – March 2, 2022
Attend informative presentations by Nikon technology leaders!
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
