The inline Alignment Station (iAS) and Litho BoosteriAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
Visit Nikon Precision Nikon invites you to visit our booth #1855 in South Hall to learn about industry-leading lithography and inspection solutions. While you’re there, meet with our team and enter to win raffle prizes!
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
iAS is a high speed, pre-measurement module integrated between the coater/developer and NSR-S635E immersion scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the Litho Booster Standalone Alignment Station.
Nikon invites you to visit our booth #1855 in South Hall
to learn about industry-leading lithography and inspection solutions.
While you’re there, meet with our team and enter to win raffle prizes!
We invite you to explore a Career at Nikon Precision or Nikon Research Corporation of America! To learn more about our current open positions, click below.
