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Nikon Introduces Next Generation KrF Scanner for Advanced 110 nm Devices Throughput boosted 30% over previous generation

Belmont, Calif., July 8, 2003 -Nikon Corporation launched its third new system in less than a week, the NSR-S207D. Targeted at 110 nm devices that are ramping into volume production, the system is the 7th generation of Nikon’s successful KrF scanner series. The system combines a high NA (0.82) projection lens with a newly developed, high productivity platform, significantly improving throughput performance and alignment accuracy.

Nikon continues its focus on leading-edge technology with high productivity. The NSR-S207D can process more than 160 – 200 mm wafers per hour and more than 115 – 300 mm wafers per hour, an increase of 30% over the previous generation KrF scanner. The new platform incorporates high acceleration wafer and reticle stages with optimized wafer handling to increase throughput and alignment accuracy.

To ensure tight profile and CD control across the wafer, Nikon designed the projection lens with the lowest aberration and flare levels in the industry. High quality materials and proprietary manufacturing technology provides a virtually perfect lens. The NSR-S207D includes detailed environment control systems to ensure the lens quality is maintained over the life of the product. Nikon’s lenses are recognized throughout the industry for their high quality and durability.

“With three new systems introduced this week, Nikon now offers our customers a complete range of new products to meet their technical and productivity requirements”, stated Geoff Wild, CEO of Nikon Precision, Inc. “Customers focused on leading-edge applications will recognize significant cost savings with our new KrF and ArF steppers and scanners.

Nikon will begin shipping systems after October of this year.

About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,200 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.


This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.

Bernie Wood
Director of Marketing
Nikon Precision Inc.,
(650) 413-8533 phone