Nikon Precision | USA & Europe | Nikon Global Site


February 8, 2003
Belmont, Calif., July 8, 2003 -Nikon Corporation launched its third new system in less than a week, the NSR-S207D. Targeted at 110 nm devices that are ramping into volume production, the system is the 7th generation of Nikon’s successful KrF scanner series. The system combines a high NA (0.82) projection lens with a newly developed, high...