Nikon offers a complete range of innovative lithography systems that deliver maximized productivity, superior technology, and lowest cost of ownership. Every Nikon stepper and scanner incorporates our legendary optics and comes with world-class Nikon customer support.

Nikon lithography equipment meets the diverse needs of today’s fab managers with the 2205i14E2 5x stepper, the SF155 wide-field stepper, and the cost-efficient S210D KrF and S310F ArF scanners. Nikon is also shipping the NSR-S620D immersion scanner, which supports overlay capabilities down to 2 nm and throughput up to 200 wafers per hour. Nikon developed the S620D (NA = 1.35), based on the new Streamlign platform, to not just satisfy the aggressive performance requirements for double patterning (DP) lithography at 32 nm, but to also be extendible to 22 nm applications and beyond. Most recently, Nikon announced the NSR-S320F, the next evolution of the Streamlign platform, to deliver exceptional performance and productivity for the most critical dry ArF applications. 

Nikon has also been actively developing products specifically for ABS, MEMS, and LED-type applications. The NES Mini Steppers have extremely small footprints and provide cost-effective solutions that satisfy the requirements for large depth of focus and backside alignment capabilities that are vital in these growing markets.

Lithography requirements continue to accelerate. With a proven history of innovation, Nikon will be there to meet the challenge and keep our customers ahead of the competition.