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January 6, 2000
New System Creates the Most Effective Mix and Match with the KrF Excimer Laser Scanner January 6, 2000 – Belmont, California – Nikon Precision Inc. announced today that it will begin accepting orders for the new NSR-SF100 i-line stepper this month. The new stepper achieves resolutions of 0.4 microns or smaller with a 1:4 reduction ratio...