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Day

March 1, 2002
JSR selects Nikon S305C and S306B for ArF Resist Development Belmont, Calif., March 1, 2002 — Nikon Precision Inc. (NPI), the North American lithography subsidiary of Nikon Corporation, Japan, and JSR Microelectronics, USA announced today that they have reached agreement on JSR’s purchase of two Nikon ArF Scanners. One of the units, the S305C, will be...