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July 27, 2003
Belmont, Calif., July 7, 2003 -Nikon has shipped its first electron beam (EB) stepper, the NSR-EB1A, to Semiconductor Leading Edge Technologies Inc. (Selete) in Tsukuba City, Japan. The system shipped to Selete is the world’s first full field electron projection lithography (EPL) tool and will initially be used for advanced 65 nm development. Nikon has taken...