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January 14, 2004
Belmont, Calif., January 14, 2004 – Nikon Corporation announced today that it sees no major hurdles to block the development of Extreme Ultraviolet Lithography (EUVL) systems and will start full-scale product development in 2004, with the planned launch for the system by 2006. The tool is targeted at mass production of 45 nm DRAMs and 32...