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July 10, 2000
NSR-S205C Exposure Tool with 0.75 Numerical Aperture Projection Lens Is Capable of Producing 0.13-micron Features SAN FRANCISCO, Calif., July 10, 2000 – Nikon, the leading supplier of imaging tools for the semiconductor industry, today announced that the company is accepting orders for its fifth-generation scanner with an ultra-high resolution 0.75 numerical aperture lens. Utilizing a krypton...