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July 7, 2005
High Throughput Stepper Reduces Costs for Non Critical Layers Belmont, California, July 7, 2005 – Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-SF140, a scan-field i-line stepper with high throughput and extremely low cost of ownership. The system makes use of leading-edge lens technology to achieve the same wide...