High Throughput Stepper Reduces Costs for Non Critical Layers
Belmont, California, July 7, 2005 – Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-SF140, a scan-field i-line stepper with high throughput and extremely low cost of ownership. The system makes use of leading-edge lens technology to achieve the same wide exposure field (26×33 mm) as DUV scanners, making it ideal for mix and match applications. Customers can use the NSR-SF140 for non-critical layers in mass production of next-generation memory and microprocessors. Total cost of ownership is substantially lower than other i-line stepper systems.
The NSR-SF140, Nikon’s fifth generation wide-field i-line stepper, offers increased productivity and enhanced lens performance. The light source and lens heat management have been improved, resulting in a throughput increase of 11 percent over the NSR-SF130 for typical production applications (i.e. dose = 200 mJ/cm2, 76 exposures on 300 mm wafers). The system achieves a resolution of 280 nm or better, and improvements in the lens performance have reduced distortion, greatly enhancing mix-and-match precision. The system combines superior performance with the lowest cost of ownership to help reduce semiconductor manufacturing costs.
“Nikon has been a leader in providing cost-effective solutions for our customers. Our customers recognize the value of our scan-field steppers with more than 200 systems installed worldwide,” stated Geoff Wild, CEO of Nikon Precision, Inc. He continued, “Our customers have been very satisfied with the previous generation models and are looking forward to ordering the SF140.”
Nikon will begin shipping systems in the fourth quarter of this year
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,600 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our web site at www.nikonprecision.com
Forward Looking Statements
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
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Nikon Precision Inc.,
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