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December 6, 2023
Advanced solution for critical layers, and supports 3D semiconductor device production Tokyo, Japan – December 6, 2023 – Nikon Corporation (Nikon) is pleased to announce the release of the NSR-S636E ArF immersion scanner, with system sales launching in January 2024. With the highest productivity of any lithography system across the impressive history of Nikon, the NSR-S636E...