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Nikon Lithography Tools Used To Fabricate First Fully Functional Chips Employing 90nm Technology

Mix-and-Match Strategy Using Nikon’s NSR-305 and NSR- 204 Scanners Produced Results Required for Leading-Edge Logic Production

BELMONT, Calif, – March 20, 2002 — Nikon Precision Inc. announced that a combination of its NSR-305B ArF and NSR-204B KrF scanners along with its NSR-SF100 i-line steppers were used by a leading semiconductor manufacturer to produce the industry’s first functional integrated circuits employing 90nm. The combination of the high resolution capability of the NSR-305 and 204 and the lower cost, high performance of the NSR-SF100 stepper provides the capability to competitively manufacture 90nm devices in high volume production. The 90nm technology was developed on 300 mm wafers.

“By providing exposure tools with matching field size and throughput we allow our customers to configure the cost effective tool sets that are required to obtain the resolution and throughput necessary to be successful in this extremely competitive environment”, stated Frank Masciocchi, Vice President – Sales and Marketing for Nikon Precision Inc.

The NSR-305B, Nikon’s 2nd generation ArF scanner, has a 0.68 numerical aperture and can process up to 78 – 300mm wafers per hour. The NSR-204B, Nikon’s 4th generation KrF scanner, has a 0.68 NA and processes up to 80 – 300mm wafers per hour. The NSR-SF100 scan field stepper employs i-line illumination while matching the field size and throughput of the scanners.

The semiconductor industry’s need for products like the NSR305 is driven by the requirement to make ever smaller and faster devices that are less costly and require less power than their predecessors. Devices based on 130nm began shipping this year.

About Nikon:
Nikon Precision Inc. is the North American subsidiary of Nikon Corporation, the world leader in lithography equipment for the microelectronics manufacturing industry with more than 6,900 systems installed worldwide including over 700 DUV scanning systems. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the wafer, photomask, flat panel display and thin-film magnetic head industries. Nikon Precision provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.

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U.S. Contacts:
Frank Masciocchi
Vice President Sales and Marketing
Nikon Precision Inc.
650 508 4618
frankm@nikon.com

Susan Bernardi
Nikon Precision Inc.
(650) 508-3819
sbernardi@nikon.com