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March 20, 2002
Mix-and-Match Strategy Using Nikon’s NSR-305 and NSR- 204 Scanners Produced Results Required for Leading-Edge Logic Production BELMONT, Calif, – March 20, 2002 — Nikon Precision Inc. announced that a combination of its NSR-305B ArF and NSR-204B KrF scanners along with its NSR-SF100 i-line steppers were used by a leading semiconductor manufacturer to produce the industry’s first...