Nikon Precision | USA & Europe | Nikon Global Site

Nikon Announces High Throughput i-line Stepper

New Stepper Reduces Costs for Sub-Critical Layers

Belmont, California – November 29, 2007 – Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-SF155, a scan field i-line stepper with ultra-high throughput and the lowest cost of ownership. Throughput has been increased to 200 wafers per hour or more, with overlay accuracy reduced to less than 25 nm. The system makes use of leading-edge lens technology to achieve the same wide exposure field as DUV scanners, making it ideal for mix-and-match applications. Customers can use the SF155 for sub-critical layers in mass production of next-generation memory and microprocessor devices.

In 2006, Nikon developed the NSR-SF150, which uses Nikon’s Skyhook Technology to eliminate the influence of ground and stage vibrations, resulting in improved overlay accuracy. The NSR-SF155 further enhances overlay performance with new stage countermasses and improved temperature stabilization in the chamber.

The combination of the optimized platform design, Skyhook Technology, and new high-speed wafer stage results in a stepper that delivers superior performance with the lowest cost of ownership. Customers can upgrade their existing SF150 steppers to the SF155 configuration to gain the improved throughput and overlay performance.

“Our SF-based products have gained wide customer acceptance with more than 350 systems operating around the world today. The new SF155 incorporates significant enhancements that boost productivity while reducing cost of ownership. Customer interest is very high for this new product,” stated Geoff Wild, CEO of Nikon Precision, Inc.

About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,800 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our web site at

Forward Looking Statements
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.


Bernie Wood
Director of Marketing
Nikon Precision Inc.
(650) 413-8533 phone