Belmont, Calif., May 6, 2003 - Nikon Precision Inc. (NPI) announced the sale of ArF scanners to the AZ Electronic Materials business of Clariant Corporation in Somerville, New Jersey. The sale includes Nikon’s S306C and S306D systems, with shipment starting in April 2003. The S306D scanner features 0.85 NA with 80 nanometer resolution performance, Nikon’s most advanced semiconductor ArF scanner available today. The systems will be used at AZ Electronic Materials’ functional testing and quality control fab to characterize 193 nm resist performance.

This is the first sale of Nikon semiconductor equipment to AZ Electronic Materials and the first ArF scanner to be installed at their facility. “NPI is very excited about this new relationship,” said Frank Masciocchi, vice president of sales and marketing. “We are pleased to be able to assist in demonstrating the performance of AZ Electronic Materials’ ArF resist. The collaboration will provide benefits for the customers of both our companies.”

Friedrich Herold, vice president of AZ Electronic Materials, pointed out that, “We chose to partner with Nikon because it is a leading manufacturer of high-quality tools. Our customers are as anxious as we are to make use of these high-NA tools, which offer both 8- and 12-inch capability.”
The first Nikon S306D has shipped to a U.S. customer in March of this year. AZ Electronic Materials will receive its S306D tool in 2004. The S306C tool with 0.78 NA shipped in April and is being installed.

About Nikon:

Nikon Corporation is the world leader in lithography equipment for the microelectronics manufacturing industry with a 32% worldwide market share and more than 7,000 exposure systems installed worldwide, including over 700 DUV scanning systems. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the wafer, photomask, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision provides service, training, applications and technical support, as well as sales and marketing, for Nikon lithography equipment in North America.

# # #
Press inquiries:
Frank D. Masciocchi, Vice President, Sales and Marketing
(650) 508-4674

Customer inquiries:
Nikon Precision Inc.
(650) 508-4674
npicom@nikon.com